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Contents (Note: Page numbers are as in the whole book so that the index remains valid) Acronyms …………………………………………………….……………………… Preface ……………………………………………………………………………….
5
iii iv
The scanning electron microscope 5.1 5.2 5.3 5.4 5.5 5.6 5.7 5.8 5.9 5.10 5.11 5.12 5.13 5.14
How it works ……………………………………………… 122 Obtaining a signal in the SEM ……………….………….… 124 The optics of the SEM ………………………….…………. 131 The performance of the SEM ………………….………….. 133 The ultimate resolution of the SEM .…………….…..……. 135 Topographic images ...…………………………..………… 141 Compositional images ……………...…………..……….… 146 Crystallographic information from the SEM …………...…. 149 The use of other signals in the SEM ……………….....…... 153 Image acquisition, processing and storage ……….……….. 159 The preparation of specimens for examination in the SEM .. 162 Low voltage microscopy……………………………………164 Environmental scanning electron microscopy (ESEM) …… 166 Questions …………………………………………………... 167
Further reading ……………………………………………………………..…………... 236 Answers …………………………………………………………………………………... 238 Index …………………………………………………………………………..…………... 243
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).
__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).